The application of dry vacuum pumps is very extensive, mainly in the following aspects. Below, I will introduce the application range and scenarios of dry vacuum pumps:
1) Low-pressure chemical vapor deposition in the preparation process of polysilicon;
2) Semiconductor etching processes. Corrosive gases and abrasives are often used or generated in these manufacturing processes;
3) Apart from semiconductor processes, some process steps generate particles, and it is undesirable for these particles to mix with pump oil. It is hoped that the particles can be discharged from the pump, which can be achieved with certain types of dry mechanical vacuum pumps;
4) In the chemical industry, pharmaceutical industry, and food industry, for distillation, drying, defoaming, packaging, and preventing contamination caused by organic solvents, it is suitable to be used in conjunction with dry vacuum pumps;
5) Used as a forepump for ordinary oil-free cleaning vacuum systems to prevent oil contamination.