Turbomolecular pumps for vacuum solutions.
·Intelligent design, excellent performance, compact size, powerful functionality.
·The complete turbo molecular pump product has a pumping speed ranging from 10 to 2,700 liters per second.
·Higher cost-performance ratio and flexible installation methods.
·High extraction speed is not affected by high load or the intrusion of impurity gases.
·Clean, environmentally friendly, and oil-free.
Applied to:
Photovoltaics, lighting, aerospace, semiconductors, energy, military industry, lasers, home appliances, materials, automobiles, scientific research, etc.
Company Name :
Shanghai Aifa Technology Co., Ltd.Brand :
AIFATechnical parameters
|
Model
|
Turbo-H160/800-FF
|
Turbo-H160/800-FFD
|
Turbo-H200/1400-FF
|
Turbo-H200/1400-FFD
|
|
Inlet Diameter
|
DN160 mm
|
DN200 mm
|
||
|
Exhaust Diameter
|
KF40 mm
|
KF40 mm
|
||
|
Pumping Speed
|
800 L/s
|
1400 L/s
|
||
|
Ultimate Pressure
|
5×10⁻⁷ Pa
|
|||
|
Maximum Fore-pressure
|
100 Pa
|
|||
|
For N₂
|
10⁸
|
|||
|
For H₂
|
1×10⁴
|
|||
|
Atmospheric Shock Resistance
|
Yes
|
|||
|
Motor Speed
|
24,000 r/min
|
|||
|
Start-up Time
|
<10 min
|
|||
|
Lubricating Oil Volume
|
260 mL
|
/
|
260 mL
|
/
|
|
Installation Position
|
Vertical
|
Any orientation
|
Vertical
|
Any orientation
|
|
Cooling Method
|
Water-cooled
|
|||
|
Cooling Water Consumption
|
90 L/h
|
|||
|
Cooling Water Temperature
|
<24°C
|
|||
|
Baking Temperature
|
100±10°C
|
|||
|
Model
|
Turbo - H250/2000 - FF
|
Turbo - H250/2000 - FFD
|
Turbo - H400/4000 - FFD
|
Turbo - H320/3201 - FFD
|
Turbo - H400/4301 - FFD
|
|
Inlet Diameter
|
DN250mm
|
DN400mm
|
DN320mm
|
DN400mm/VG350mm
|
|
|
Exhaust Diameter
|
KF40mm
|
KF40mm
|
|||
|
Pumping Speed
|
2000L/S
|
4000L/S
|
3400L/S
|
4500L/S
|
|
|
Ultimate Pressure
|
5×10⁻⁷Pa
|
||||
|
Maximum Fore-pressure
|
100Pa
|
||||
|
For N₂
|
10⁸
|
||||
|
For H₂
|
1×10⁴
|
||||
|
Can Withstand Atmospheric Pressure
|
Yes
|
/
|
|||
|
Motor Speed
|
24000r/min
|
18000r/min
|
24000r/min
|
||
|
Start-up Time
|
<10min
|
<20min
|
|||
|
Lubricating Oil Quantity
|
260ml
|
/
|
260ml
|
/
|
|
|
Installation Position
|
Vertical
|
Any
|
Vertical
|
Any
|
|
|
Cooling Method
|
Water-cooled
|
Air-cooled
|
|||
|
Cooling Water Consumption
|
90L/h
|
/
|
|||
|
Cooling Water Temperature
|
<24℃
|
/
|
|||
|
Baking Temperature
|
100±10℃
|
/
|
|||
Pumping speed graph
Dimensional installation drawing
Turbomolecular pump
Turbomolecular pumps for vacuum solutions. ·Intelligent design, excellent performance, compac...
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