In the past classification, oil vacuum pumps have been widely used in various semiconductor processes, and piston-type vacuum pumps are important representatives. Moreover, their manifestation in various applications cannot be a source of pride. Therefore, dry vacuum pumps have emerged. Over the past years, there have been several different examples of the planning and production of dry vacuum pumps, which exhibit significant differences in machine layout planning. Due to these distinctions, we can categorize dry vacuum pumps into the following types: circular blade, claw type, combination type (roots), and screw type. Nowadays, these examples are widely used by different manufacturers. Circular, claw, and combination (roots) are referred to as multi-stage pumps. Because their methods are fundamentally similar, vacuum is generated by repeatedly compressing gas in multi-stage vacuum chambers. During the process of repeated compression, the temperature and pressure of the gas can also undergo significant changes, making it easier to alter the physical properties of the gas. Screw-type pumps are referred to as single-stage pumps because they can only generate vacuum from the vacuum chamber. Depending on the different methods of gas compression, they can be divided into internal pressure screw pumps and external pressure screw pumps. Here are some physical examples of these differential pumps, looking forward to providing funding for them.

The dual peak scheme is very similar to the Roots pump, which is currently the most popular and widely used. In fact, the earliest dry pump plans involved combining Roots pumps. This multi-stage scheme creates a very large gas path, with each stage requiring a larger nitrogen flow rate for dilution and cutoff. At the same time, to achieve a good vacuum, the clearance requirements for all stages are very strict. Of course, this procedure results in relatively low power consumption due to the increase in internal compression ratio.

The principle of the three-blade circular scheme is completely the same as that of the two-blade split scheme. It divides the gas into three parts instead of a circular petal, which consists of two copies. The three-blade ring design and the dual circular split scheme have similar advantages and disadvantages. To further reduce power consumption, some manufacturers choose two DC motors in the transmission department, but this can also lead to a decrease in torque and a reduction in the ability to restart. In the same way as the dual circular split scheme, each three-split circular blade scheme requires a larger flow rate of nitrogen for dilution effects.